FORMATION OF ZIRCONIUM TITANATE FROM MULTI-LAYERED STRUCTURE OF ZrO2 AND TiO2 DEPOSITED BY PULSED RAPID THERMAL CHEMICAL VAPOUR DEPOSITION

Document Type : Original Article

Authors

1 Graduate student, Dpt. of Chemical Engineering, Kangwon National University, Chuncheon, Korea.

2 Analytic scientist, Central Laboratory, Kangwon National University, Chuncheon, Korea.

3 Professor, Dpt. of Chemical Engineering, Kangwon National University, Chuncheon, Korea, Tel)+82 11 380 5219.

Abstract

ABSTRACT
PRTCVD (pulsed rapid thermal chemical vapor deposition) method has been introduced to prepare zirconium titanate (ZrTiO4) films from a multi-layered structure composed of ZrO2 and TiO2 as a primitive oxide, which allows for the preparation of a given film with different element per cycle and precise control over the thickness of the film. The feasibility of PRTCVD was evaluated and it was confirmed that a multi-layered structure composed of different primitive oxides can be easily produced by PRTCVD and transformed into a multi-component single phase oxide such as zirconium titanate by an appropriate thermal annealing process.

Keywords

Files

Share

How to cite

Statistics